Kozincev

This article considers laser method of measurement of thickness and refraction index of a nanofilm on substrate. It is shown that the method based on determination of the first-order derivative of reflection coefficient allows to measure (with very few measurement errors) thickness and refraction index of a film at a measurement error of determination of reflection coefficient and first-order derivative of reflection coefficient by ~ 0,3 % in a wide range of refraction index (~ 3…7 and more) and thickness (~ 10…100 nm and more).