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Investigation of interaction of deuterium plasma with tungsten targets
Engineering Education # 12, December 2013
DOI: 10.7463/1213.0669439
Assessment of retention of hydrogen isotopes in co-deposited films is of great interest for the problem of selecting materials for plasma-facing components of International Thermonuclear Experimental Reactor. The purpose of this work was to study deposition peculiarities of tungsten-deuterium films formed on silicon substrates by sputtering tungsten targets in deuterium plasma of magnetron discharge. Deuterium content in films was determined by the Elastic Recoil Detection method; tungsten concentration was calculated from the measurements of the film’s weight; the film’s thickness was determined by a profilometer. It was established that deuterium content in co-deposited films is comparable with that of tungsten atoms. It was suggested that the retained deuterium is located in the pores formed during the film growth. Increase in the distance between the target and substrate leads to decrease in the deuterium content in the film and subsequently to reduction in film porosity and to growth of its density.
 
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