Другие журналы

. A B C D E F G H I J K L M N O P R S T U V W Y Z К М С Т

Gladkih


# 10, October 2012
УДК: 004
77-48211/368628 Methods of Dummy-structure optimal allocation
Engineering Education # 05, May 2012
 The article deals with methods of dummy-structure allocation on the patterns of topological layers of VLSIC, allowing to minimize the crystal surface remanent relief when creating multilayer metal coating. These methods are based both on simulation of chemico-mechenical planarization operation (CMP) (MBDF) and usage of filling rules (RBDF). The authors present an algorithm of calculation of local density of VLSIC topological layer filling. This local density filling was used in the method of topology filling with dummy-figures based on simulation of CMP operation.
 
SEARCH
 
elibrary crossref ulrichsweb neicon rusycon
Photos
 
Events
 
News



Authors
Press-releases
Library
Conferences
About Project
Rambler's Top100
Phone: +7 (915) 336-07-65 (строго: среда; пятница c 11-00 до 17-00)
  RSS
© 2003-2020 «Наука и образование»
Перепечатка материалов журнала без согласования с редакцией запрещена
 Phone: +7 (915) 336-07-65 (строго: среда; пятница c 11-00 до 17-00)