Schurenkova

The effect of the value of arc magnetic field induction and discharge current on the speed of cathode spots on a cold cathode of vacuum-arc evaporation system in inert and reactive gas atmosphere was explored. The cathode spots’ speed dependence from the value of the magnetic field induction and discharge current was investigated. It was shown that the induction and discharge current increasing leads to a rise of the cathode spots’ speed. In this case, it doesn’t matter whether we use reactive or inert gas.