Podkopaeva

The article analyzes microactuator nonlinear dеfопnаtiоп process and geometric parameters and inertia forces influence оп the thепnоЫmеtalliс microactuator working characteristic. Microactuator is an element of microelectromechanical systems (MEMS) and micro-opto-electromechanical systems, which аге widely used nowadays. These elements have to meet special requirements. The unique numerical calculation program, which enahles to move along any parameter of continuation (including geometrical parameter), is described. This gives an opportunity to consider different shell families and to solve not only analysis task, but also the synthesis prohlem.